7 results
Pt Segregation at the NiSi/Si Interface and a Relationship with the Microstructure of NiSi
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E02-09
- Print publication:
- 2008
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Highly Reliable Metal Gate nMOSFETs by Improved CVD-WSix films with Work Function of 4.3eV
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- Journal:
- MRS Online Proceedings Library Archive / Volume 811 / 2004
- Published online by Cambridge University Press:
- 28 July 2011, D4.2
- Print publication:
- 2004
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Mechanism of the Suppression of Zr Silicide Formation in Poly-Si/ZrON/ZrSiON/Si Structure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B3.6
- Print publication:
- 2002
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Reduction of Whisker-Originated Short between W Polymetal and Contact Plug
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K5.6
- Print publication:
- 2001
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Advanced Ion Implantation Technology for High Performance Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J1.3
- Print publication:
- 2001
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Cryo-Implantation Technology for Controlling Defects and impurity out diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B3.8
- Print publication:
- 2000
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Amorphous Ti-Si-N Barrier Metal for Cu Metallization on Ulsis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 459
- Print publication:
- 1994
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